Automatic Ultrasonic Atmosphere Heating Spin Coater for Semiconductor Silicon Wafers

• Overview
• Product Description
• Product Parameters
• Detailed Photos
• FAQ

Overview

Basic Info.

Model NO.	TN-SPC12T-SS-UL
Coating	Vacuum Coating
Substrate	Steel
Certification	CE
Condition	New
Chamber Material	PTFE
Upper Cover	PVC
Sample Stage	Gold-Plated Copper Plate, with Good Thermal Conduc
Substrate Size	Diameter ≤ 4 Inches (100mm)
Heating Mode	Ceramic Heating Ring
Operating Temperature	Rt-200ºC
Liquid Drain Pipe and Waste Liquid Tank	PTFE
Chucks	10/25/55/100mm
Operation Mode	7 Inch HD LCD Touch Screen
Material	Liquid or Colloidal
Transport Package	Fumigated Wooden Box
Specification	290mmx365mmx260mm
Trademark	TN
Origin	China
HS Code	8486209000
Production Capacity	200/Month

Product Description

Thanks for your efforts to make the world bettter! Any questions about our spin coater, please contact us.

Automatic Ultrasonic Atmosphere Heating Spin Coater for Semiconductor Silicon Wafers

Product Description

TN-SPC12T-SS-UL spin coater is a 300mm diameter, flexible rotary glue dispenser. It can spray the glue on the substrate through an ultrasonic nozzle, and then rotate at a high speed to make the glue evenly coated on the substrate. The spin coatr operation can also be performed alone. There is a heating element in the cavity, which can be baked after the glue is mixed. The product has a gas path controlled by two-way float flowmeter, which can pass inert gas into the cavity to protect the glue liquid from the influence of gas in the air during glue mixing. Automatic Ultrasonic Atmosphere Heating Spin Coater is suitable for surface coating of semiconductor silicon wafers, glass slides, wafers, substrates, ITO conductive glass and other processes and plate making. The maximum wafer size that can be glued is 12 inches, the speed can reach 3000rpm, and the acceleration can reach 2000rpm; it has the advantages of stable speed, quick start, convenient operation, etc., and can ensure the consistency and uniformity of the glue thickness. It is a performance excellent product.

Product features
1. Adopt DC brushless motor, controlled by single chip microcomputer
2. High-definition touch screen control
3. Single-step multi-step glue mixing operation can be performed, five programs can be stored, and five-step operations can be set for each program
4. Anti-blocking glue design
5. Aluminum alloy cavity, sturdy and durable
6. With ultrasonic, atmosphere, heating and other auxiliary functions, it can provide various auxiliary functions for the research of glue mixing.

Product Parameters

Product name	Ultrasonic Assisted Atmosphere Dispenser
Wafer size	12 inches
Spinning speed	30~3000rpm adjustable
Rotational acceleration	30~2000rpm/s adjustable
The longest glue mixing time in a single time	3000s
Dispensing cavity size	φ390mm*90mm
Voltage	220V 50Hz
Power	1.5KW
Heating temperature	0-100ºC
Warranty time	Excluding wearing parts, 1 year, lifetime technical support
Glue machine vacuum suction cup	12 inch one (standard); 6 inch one (customized)
Customized pure mechanical chuck for glue machine	12" one (additional custom); 6" one (additional custom)
Oil-free vacuum pump	Model:AP-2000V Power:0.55kw Minimum vacuum:-700mmHg;-92Kpa Maximum Air Flow:200L/min;12M3/h Weight:10kg

Ultrasonic system

Atomizer head material	Titanium alloy
Frequency	50kHz
Power	30W
Flow	0.55mL/s
Particle diameter	25um
Atomizer head type	Conical
Atomizer head weight	0.3kg
Ultrasonic power supply size	315*312*135mm
Ultrasonic power supply weight	5kg

Injection pump

Flow range	0.001uL/min-43.349mL/min
Power-down memory function	Save the setting parameters, after power on again, no need to set
Applicable injector specifications	10uL-1000uL
Applicable Syringe Specifications	1mL-60mL
Heating temperature	0-100ºC
Linear speed range	5um/min-65um/min
Linear speed adjustment resolution	5um/min
Maximum stroke	140mm
Stroke resolution	0.156um
Rated linear thrust	>90N

Flowmeter

Control gas types	2 kinds
Gas flow rate	16-160mL/min

Detailed Photos

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use ****** Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact us.

FAQ